Bioinspired Multilegged Piezoelectric Robot: The Design Philosophy Aiming at High‐Performance Micromanipulation

Micromanipulation robots are powerful tools to explore and reform the microscope world, but it is difficult integrate high precision, long stroke, strong carrying capability, multi-degree of freedom (DOF) motions in a single robot. To address this challenge, herein bioinspired hexapod piezoelectric robot (PER-hexapod) aiming at high-performance micromanipulation presented. Specifically, two elements integrated functional module provide 3-DOF precise motions, collaboration six modules generates multi-DOF multimode fusion three gaits facilitates cross-scale motion. The outputs 6-DOF with resolutions higher than 4 nm or 0.2 μrad, unlimited traveling ranges in-plane accomplished. PER-hexapod, whose weight 0.45 kg, can stably drive load 10 kg. In addition, PER-hexapod realizes accurate positioning root-mean-square error less 5 nm. Thus, has potential applications large range, such as batch injection multiple cells micromachining on surfaces. Not only many other be also designed same philosophy construct systems for various requirements.